Elastic instabilities induced large surface strain sensing structures (EILS)

Author

Li, Y. ; Terry, J.G. ; Smith, S. ; Walton, A.J. ; McHale, G. ; Xu, B.

Author_Institution

Smart Mater. & Surfaces Lab., Northumbria Univ., Newcastle upon Tyne, UK

fYear

2015

fDate

23-26 March 2015

Firstpage

94

Lastpage

99

Abstract

This paper reports on the sensing of large strain using a mechanically actuated switch gate and a variable resistor surface creasing test structure. Test structures with different gate and interconnect/wiring geometries have been designed, fabricated and characterised. They respond to designed strain values with a reduction in device resistivity of 11 to 12 orders of magnitude. Results from strain measurements ranging from 0.2 to 0.6 are reported for test structures with electrode spaces of 10 to 60 μm.

Keywords

elasticity; strain measurement; strain sensors; device resistivity; elastic instabilities; electrode spaces; interconnect/wiring geometries; large surface strain sensing structures; mechanically actuated switch gate; strain measurements; variable resistor surface creasing test structure; Electrical resistance measurement; Electrodes; Films; Gold; Resistance; Strain; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures (ICMTS), 2015 International Conference on

Conference_Location

Tempe, AZ

ISSN

1071-9032

Print_ISBN

978-1-4799-8302-5

Type

conf

DOI

10.1109/ICMTS.2015.7106116

Filename

7106116