• DocumentCode
    708652
  • Title

    NPN CML ring oscillators for model verification and process monitoring

  • Author

    Compton, Cory

  • Author_Institution
    MACOM, Newport Beach, CA, USA
  • fYear
    2015
  • fDate
    23-26 March 2015
  • Firstpage
    103
  • Lastpage
    108
  • Abstract
    A set of NPN CML (Current Mode Logic) oscillators is designed in a 0.18um SiGe BiCMOS process, with the intention to provide model verification and process monitoring capabilities. The main design goals are that the oscillators need to be small and easy to test such that many of them can be placed in the scribe line and be measured by production PCM test equipment.
  • Keywords
    BiCMOS digital integrated circuits; Ge-Si alloys; current-mode logic; integrated circuit design; oscillators; process monitoring; BiCMOS process; NPN CML ring oscillators; SiGe; current mode logic oscillators; model verification; process monitoring capabilities; production PCM test equipment; size 0.18 mum; CMOS integrated circuits; Latches; Logic gates; Phase change materials; Ring oscillators; Standards;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures (ICMTS), 2015 International Conference on
  • Conference_Location
    Tempe, AZ
  • ISSN
    1071-9032
  • Print_ISBN
    978-1-4799-8302-5
  • Type

    conf

  • DOI
    10.1109/ICMTS.2015.7106118
  • Filename
    7106118
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=708652