Title :
Design and evaluation of an integrated thin film resistor matching test structure
Author :
Tuinhout, Hans ; Wils, Nicole ; Huiskamp, Paul ; de Koning, Eelco
Author_Institution :
Integrated Technol. Platforms, NXP Semicond. - Technol. & Oper., Eindhoven & Nijmegen, Netherlands
Abstract :
A test structure is presented that combines two types of full Kelvin matched resistor pairs in a single 12 pad process control compatible test line. Based on these structures, matching results of SiCr resistors in a BiCMOS RF technology are discussed, demonstrating some of the frequently encountered challenges of interpreting subtle parametric mismatch fluctuation effects.
Keywords :
BiCMOS integrated circuits; chromium alloys; silicon alloys; thin film resistors; BiCMOS RF technology; SiCr; full Kelvin matched resistor pairs; integrated thin film resistor; matching test structure; parametric mismatch fluctuation effects; Force; Layout; Mechanical variables measurement; Resistors; Surfaces; Systematics; integrated thin-film resistor; matching; microelectronic test structure;
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2015 International Conference on
Conference_Location :
Tempe, AZ
Print_ISBN :
978-1-4799-8302-5
DOI :
10.1109/ICMTS.2015.7106127
