Title :
Nanosize roughness of microelectromechanical devices and winchesters
Author_Institution :
St. Petersburg State Univ., St. Petersburg, Russia
Abstract :
With the help of the experimental AFM measurements of our previous work the statistical exponential distributions for linear dimensions of nanosize surface elements were obtained, which permitted to derive mathematical expectations for successive collisions of the molecules on them.
Keywords :
atomic force microscopy; exponential distribution; micromechanical devices; molecules; AFM measurements; linear dimensions; mathematical expectations; microelectromechanical devices; molecules; nanosize roughness; nanosize surface elements; statistical exponential distributions; winchesters; Exponential distribution; Microelectromechanical devices; Nanoscale devices; Rough surfaces; Scattering; Surface resistance; Surface roughness;
Conference_Titel :
Mechanics - Seventh Polyakhov's Reading, 2015 International Conference on
Conference_Location :
Saint Petersburg
DOI :
10.1109/POLYAKHOV.2015.7106758
