A novel MEMS-based lab-on-a-tube technology and its application

In this paper, we present a novel micro lab-on-a-tube technology, which is a combination of three-dimensional (3D) photolithography, nanoimprint and other processes, in order to directly fabricate micro functional structures and devices on tiny capillaries. The new technology is mainly MEMS-based and several sensor prototypes including micro temperature sensor, micro coils and electrochemical electrodes have been successfully prepared on capillaries with the diameter from 300 μm to 1 mm. The minimum feature sizes have been successfully reduced down to 2 μm and smaller. Experimental characterization of the fabricated prototypes revealed that more interesting applications could be expected through integrating new bio and nanomaterials directly into the novel lab-on-a-tube technology.