Title :
Comparison of Acoustic Wave Sensors With Different Cut
Working on Pseudo-LFE Mode
Author :
Zhitian Zhang ; Chao Zhang ; Tingfeng Ma ; Wenyan Wang ; Jin Chen ; Yan Liu
Author_Institution :
Shenzhen Optomechatronics Key Lab., Tsinghua Univ., Shenzhen, China
Abstract :
In this paper, two pseudo-LFE devices made up of X-cut and (yxl) 21.82° LiNbO3 are investigated and compared. The coupling factors of both devices are calculated and the impedance characteristics are tested by impedance analyzer. The sensitivity and stability of both devices to the electrical property changes of liquid are also tested in isopropanol-water and NaClwater solution. We find that the X-cut LiNbO3 device has a higher piezoelectric coupling factor and better resonance in the deionized water than (yxl) 21.82° LiNbO3 device. The results also show that X-cut LiNbO3 devices are more sensitive to the change of liquid conductivity and permittivity than (yxl) 21.82° LiNbO3 device even with similar stability.
Keywords :
acoustic impedance; acoustic transducers; electrical conductivity; lithium compounds; permittivity; piezoelectric devices; sensors; LiNbO3; acoustic wave sensor; coupling factor; deionized water; impedance analyzer; impedance characteristics; isopropanol water; liquid conductivity; liquid permittivity; piezoelectric coupling factor; pseudo-LFE mode; water solution; Acoustic waves; Couplings; Impedance; Liquids; Lithium niobate; Resonant frequency; Sensors; Acoustic wave device; lateral field excitation; lithium niobate; pseudo-LFE mode;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2013.2249062