Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon

Author

Chae Hyuck Ahn ; Ng, Eldwin J. ; Hong, Vu A. ; Yang, Yushi ; Lee, Brian J. ; Flader, Ian ; Kenny, Thomas W.

Author_Institution

Dept. of Mech. Eng., Stanford Univ., Stanford, CA, USA

Volume

24

Issue

2

fYear

2015

fDate

Apr-15

Firstpage

343

Lastpage

350

Abstract

In this paper, we present four design methods to overcome (100) silicon crystalline anisotropy and achieve mode-matching in wineglass-mode disk resonator gyroscope (DRG). These methods were validated through experimental characterization of more than 145 different devices that arose from simulations. With the proposed methods, the frequency split of the 250-kHz DRG wineglass modes in (100) silicon was reduced from >10 kHz to as low as 96 Hz (<;0.04% of 250-kHz resonant frequency) without any electrostatic tuning. Perfect mode-matching is then achieved using electrostatic tuning. Mode-matching was maintained within ±10 Hz over a temperature range from -20 °C to 80 °C. The temperature dependence of quality factor is also discussed in this paper. These results allow for the development of high-performance miniature DRGs tuned for degenerate wineglass mode operation from high-quality crystalline silicon material.

Keywords

Q-factor; electrostatics; elemental semiconductors; gyroscopes; micromechanical resonators; mode matching; silicon; (100) silicon crystalline anisotropy; Si; electrostatic tuning; frequency 250 kHz; mode-matching; quality factor; temperature -20 degC to 80 degC; wineglass-mode disk resonator gyroscope; Anisotropic magnetoresistance; Crystals; Electrodes; Gyroscopes; Resonant frequency; Silicon; Tuning; (100) single crystal silicon; Microelectromechanical systems (MEMS) gyroscope; frequency split; mode-matching; wineglass mode; wineglass mode.;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2014.2330590

Filename

6844857