• DocumentCode
    712365
  • Title

    Integrated photonic devices and circuits in multilayer silicon nitride-on-silicon platforms

  • Author

    Poon, Joyce K. S. ; Sacher, Wesley D. ; Ying Huang ; Guo-Qiang Lo

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Toronto, Toronto, ON, Canada
  • fYear
    2015
  • fDate
    22-26 March 2015
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    Low-loss silicon nitride waveguides integrated onto silicon photonic platforms enable the scaling to large-area photonic circuits. Properties of a multilayer silicon nitride-on-silicon platform and a variety of photonic devices and circuits will be described.
  • Keywords
    elemental semiconductors; integrated optics; optical losses; optical multilayers; optical waveguides; silicon; silicon compounds; Si3N4-Si; integrated photonic circuits; integrated photonic devices; large-area photonic circuits; low-loss silicon nitride waveguides; multilayer silicon nitride-on-silicon platforms; silicon photonic platforms; Couplers; Gratings; Loss measurement; Optical losses; Optical waveguides; Photonics; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber Communications Conference and Exhibition (OFC), 2015
  • Conference_Location
    Los Angeles, CA
  • Type

    conf

  • Filename
    7121710
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=712365