Title :
High-performance Si photonics interposer featuring RF travelling-wave electrode (TWE) via Cu-BEOL
Author :
Yan Yang ; Qing Fang ; Yu Mingbin ; Xiaoguang Tu ; Junfeng Song ; Rusli ; Guo-Qiang Lo
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
A silicon Cu-photonics interposer, consisting of monolithically integrated Si modulators and Ge photodetectors, has been explored for integrated optical communication. Up to 33.7 GHz-bandwidth of this integrated circuit are enabled by travelling-wave electrode via Cu-BEOL.
Keywords :
CMOS integrated circuits; copper; elemental semiconductors; germanium; integrated optics; integrated optoelectronics; monolithic integrated circuits; optical interconnections; optical modulation; photodetectors; silicon; Cu; Cu-BEOL; Ge; RF travelling wave electrode; Si; TWE; back-end-of-line; integrated circuit; integrated optical communication; monolithically integrated Si modulators; photodetectors; silicon Cu-photonics interposer; Copper; Decision support systems; Doping; Germanium silicon alloys; Phase shifters; Silicon photonics;
Conference_Titel :
Optical Fiber Communications Conference and Exhibition (OFC), 2015
Conference_Location :
Los Angeles, CA
