• DocumentCode
    712693
  • Title

    Ultra-low loss CMOS compatible multi-layer Si3N4-on-SOI platform for 1310nm wavelength

  • Author

    Ying Huang ; Xiaoguang Tu ; Lim, Andy Eu-Jin ; Junfeng Song ; Tsung-Yang Liow ; Guo-Qiang Lo

  • Author_Institution
    Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
  • fYear
    2015
  • fDate
    22-26 March 2015
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    We demonstrated the applications of our Si3N4-on-SOI platform for O-band operation with propagation and interlayer transition loss of ~0.24dB/cm and ~0.2dB, respectively. We also characterized our SOI-based Ge photo-detector and silicon modulator at λ= 1310nm.
  • Keywords
    CMOS integrated circuits; elemental semiconductors; germanium; integrated optoelectronics; optical losses; optical modulation; photodetectors; silicon; silicon compounds; silicon-on-insulator; Ge; O-band operation; SOI-based Ge photo-detector; Si; Si3N4-Si; interlayer transition loss; propagation; silicon modulator; ultra-low loss CMOS compatible multilayer Si3N4-on-SOI platform; wavelength 1310 nm; Broadband communication; Decision support systems; Extinction ratio; Microelectronics; Optimized production technology; Roads; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber Communications Conference and Exhibition (OFC), 2015
  • Conference_Location
    Los Angeles, CA
  • Type

    conf

  • Filename
    7122079
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=712693