Title :
Low actuation series switch
Author :
Sengupta, Snehanshu ; Usha Kiran, K.
Author_Institution :
Sch. of Electron. Eng., VIT Univ., Chennai, India
Abstract :
This paper mainly concentrate on the mechanical and RF characteristics of RF MEMS series switch. This paper proposes a kind of RF MEMS switch with a special cantilever beam section which will solve the problem of actuation voltage and residual stress. The cantilever beam section having actuation voltage of 5V with stress factor 0.96Mpa. The insertion loss of the switch is 0.1dB and return loss was around 19dB at 20 GHz.
Keywords :
beams (structures); cantilevers; internal stresses; losses; microswitches; microwave switches; RF MEMS series switch; RF characteristics; actuation voltage; cantilever beam section; frequency 20 GHz; insertion loss; loss 0.1 dB; loss 19 dB; low actuation series switch; mechanical characteristics; residual stress factor; return loss; voltage 5 V; Coplanar waveguides; Micromechanical devices; Microswitches; Radio frequency; Stress; Structural beams; Cantilever beam; insertion loss; pull in voltage; residual stress; return loss;
Conference_Titel :
Electronics and Communication Systems (ICECS), 2015 2nd International Conference on
Conference_Location :
Coimbatore
Print_ISBN :
978-1-4799-7224-1
DOI :
10.1109/ECS.2015.7124755
