Low actuation series switch

Author

Sengupta, Snehanshu ; Usha Kiran, K.

Author_Institution

Sch. of Electron. Eng., VIT Univ., Chennai, India

fYear

2015

fDate

26-27 Feb. 2015

Firstpage

1110

Lastpage

1113

Abstract

This paper mainly concentrate on the mechanical and RF characteristics of RF MEMS series switch. This paper proposes a kind of RF MEMS switch with a special cantilever beam section which will solve the problem of actuation voltage and residual stress. The cantilever beam section having actuation voltage of 5V with stress factor 0.96Mpa. The insertion loss of the switch is 0.1dB and return loss was around 19dB at 20 GHz.

Keywords

beams (structures); cantilevers; internal stresses; losses; microswitches; microwave switches; RF MEMS series switch; RF characteristics; actuation voltage; cantilever beam section; frequency 20 GHz; insertion loss; loss 0.1 dB; loss 19 dB; low actuation series switch; mechanical characteristics; residual stress factor; return loss; voltage 5 V; Coplanar waveguides; Micromechanical devices; Microswitches; Radio frequency; Stress; Structural beams; Cantilever beam; insertion loss; pull in voltage; residual stress; return loss;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics and Communication Systems (ICECS), 2015 2nd International Conference on

Conference_Location

Coimbatore

Print_ISBN

978-1-4799-7224-1

Type

conf

DOI

10.1109/ECS.2015.7124755

Filename

7124755

Link To Document

https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=712993