DocumentCode :
713492
Title :
Microfluidic capacitive tilt sensor using PCB-MEMS
Author :
Salvador, Blas ; Luque, Antonio ; Quero, Jose M.
Author_Institution :
Dept. Electron. Eng., Univ. of Seville, Seville, Spain
fYear :
2015
fDate :
17-19 March 2015
Firstpage :
3356
Lastpage :
3360
Abstract :
This paper presents a low-cost tilt sensor based on fluidic movement and fabricated using PCB-MEMS techniques. The principle of operation is the measurement of capacitance change between two electronics inside a circular channel, partially filled with a non-conductive liquid. Physical principle and mathematical analysis are presented, followed by the design and fabrication process. This process is based on a combination of standard PCB processing, useful and inexpensive to create copper electrodes, with SU-8 positive photoresist to build the channels. The choice of the liquid to be used has a strong influence on the final behavior, and properties like dielectric permittivity and surface tension must be taken into account simultaneously. Experimental results show that tilt is measured using the prototype device in a range close to 360°, with a sensitivity up to 0.0036pF/° and a bandwidth of 0.18Hz.
Keywords :
capacitance measurement; capacitive sensors; mathematical analysis; microelectrodes; microfabrication; microfluidics; microsensors; photoresists; printed circuits; PCB-MEMS technique; SU-8 positive photoresist; bandwidth 0.18 Hz; capacitance measurement; circular channel; copper electrode; dielectric permittivity; mathematical analysis; microfabrication; microfluidic capacitive tilt sensor; nonconductive liquid; physical principle; surface tension; Capacitance; Capacitance measurement; Electrodes; Fabrication; Liquids; Robot sensing systems; Surface tension; Inclinometer; MEMS; Microfluidic; PCB; Tilt Sensor;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Industrial Technology (ICIT), 2015 IEEE International Conference on
Conference_Location :
Seville
Type :
conf
DOI :
10.1109/ICIT.2015.7125596
Filename :
7125596
Link To Document :
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