An 8×1k SPAD detector with TDI in 0.13μm CMOS technology

A wider variety of practical applications employ single photon avalanche diode (SPAD) operating in Geiger mode to detect the extremely weak optical signal due to many advantages, such as higher avalanche gain and faster response speed. In this paper, we report a high-performance linear scan SPAD detector with time delay integration (TDI) to enhance the dynamic range and signal to noise ratio (SNR). The detector is fabricated in 0.13μm CMOS technology and it comprises an array of 8×1k SPAD pixels, quenching circuits, readout modules and other necessary peripheral circuits.