Title :
Analysis of the impact of release area on the quality factor of contour-mode resonators by laser Doppler vibrometry
Author :
Gibson, Brian ; Qalandar, Kamala ; Turner, Kimberly ; Cassella, Cristian ; Piazza, Gianluca
Author_Institution :
Dept. of Mech. Eng., Univ. of California, Santa Barbara, Santa Barbara, CA, USA
Abstract :
Energy dissipation through the anchors of an aluminum nitride (AlN) MEMS contour-mode resonator (CMR) plays an important role in setting the device quality factor at frequencies under 500MHz [1]. The acoustic energy leaving the resonator is effected, not only by the anchor, but also the portion of the surrounding device layer that has been released from the substrate during fabrication. Typical device simulations used for design do not take into account the motion of this additional area. Using laser Doppler vibrometery and COMSOL simulations we show a variation in device Q by 28% as a result of the motion of this released region.
Keywords :
III-V semiconductors; Q-factor measurement; acoustic resonators; aluminium compounds; measurement by laser beam; microfabrication; micromechanical resonators; vibration measurement; wide band gap semiconductors; AlN; CMR; COMSOL simulation; MEMS contour-mode resonator; energy dissipation; laser Doppler vibrometry; quality factor; Aluminum nitride; Electrodes; III-V semiconductor materials; Optical resonators; Q-factor; Resonant frequency; Substrates;
Conference_Titel :
Frequency Control Symposium & the European Frequency and Time Forum (FCS), 2015 Joint Conference of the IEEE International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4799-8865-5
DOI :
10.1109/FCS.2015.7138940
