Title :
Fabrication of Silicon nanowires suitable for lithium ion battery anode material
Author :
Faramarzi, M.S. ; Sanaee, Z.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Tehran, Tehran, Iran
Abstract :
We report fabrication of Silicon nanowires (SiNWs) array by a metal assisted chemical etching method using an Au catalyst layer on Silicon wafer, as a simple wafer-scale preparation method of SiNWs. Nano-rods with diameter of 100nm and length of 10μm were obtained. The fabricated nanostructures were used as lithium-ion battery anode, and showed the high capacity value around 6 mAh/cm2 under current density of 200μA/cm2.
Keywords :
catalysts; electrochemical electrodes; elemental semiconductors; etching; gold; nanowires; secondary cells; silicon; Au; Au catalyst layer; Si; SiNW array; chemical etching method; current density; lithium ion battery anode material; radius 50 nm; silicon nanowires suitable fabrication; silicon wafer; size 10 mum; wafer-scale preparation method; Conferences; Decision support systems; Electrical engineering; Anode; Lithium Ion battery; Metal-assisted Chemical Etching; Silicon Nanowire;
Conference_Titel :
Electrical Engineering (ICEE), 2015 23rd Iranian Conference on
Conference_Location :
Tehran
Print_ISBN :
978-1-4799-1971-0
DOI :
10.1109/IranianCEE.2015.7146390
