Deposition of high quality epitaxial YBCO film on thin crystalline substrate for bolometer fabrication

We present the results of the deposition of high quality YBCO superconducting film on 50μm thin crystalline substrate for the fabrication of bolometric transition-edge sensors. C-axis epitaxial layers of high-temperature superconducting YBCO film were prepared by RF magnetron sputtering method on SrTiO₃ substrates. The thin film crystal growth morphology is studied by SEM images, and the superconducting properties were determined by R vs. T measurements. The temperature gradient of the film resistances are measured and compared to that of the previously deposited YBCO crystalline thin films using PLD method. The films were patterned into meander lines for the four-probe characterization and also fabrication of transition-edge bolometer.