Zno nanostructures via hydrothermal synthesis on atomic layer deposited seed-layers

Author

Orlov, Anatolii ; Ulianova, Veronika ; Bogdan, Oleksandr ; Pashkevich, Genadzi ; Biyikli, Necmi ; Goldenberg, Eda ; Haider, Ali

Author_Institution

Res. Inst. “Appl. Electron.”, Nat. Tech. Univ. of Ukraine “KPI”, Kiev, Ukraine

fYear

2015

fDate

21-24 April 2015

Firstpage

89

Lastpage

92

Abstract

The original results of two different types of ZnO nanostructures grown via hydrothermal synthesis on ZnO seed-layers coated by atomic layer deposition process on Si substrates were presented. Scanning electron microscopy and X-ray diffractometry were used for the analysis of resulting nanostructured ZnO samples. The influence of annealing on crystal properties of the ZnO nanostructures was shown. It was ascertained that solution composition had a significant influence on the morphology of nanostructures and post-growth annealing modified the crystal properties of nanostructures.

Keywords

II-VI semiconductors; X-ray diffraction; annealing; atomic layer deposition; crystal growth from solution; nanofabrication; scanning electron microscopy; semiconductor growth; wide band gap semiconductors; zinc compounds; Si; X-ray diffractometry; ZnO; atomic layer deposited seed-layers; hydrothermal synthesis; morphological properties; nanostructures; postgrowth annealing; scanning electron microscopy; solution composition; Annealing; Films; II-VI semiconductor materials; Nanostructures; Substrates; Zinc oxide; ZnO nanostructures; atomic layer deposition; hydrothermal synthesis; seed-layer; zinc acetate; zinc nitrate;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics and Nanotechnology (ELNANO), 2015 IEEE 35th International Conference on

Conference_Location

Kiev

Type

conf

DOI

10.1109/ELNANO.2015.7146841

Filename

7146841