Title :
SAW UV sensor based on ZnO and Al-doped ZnO nanorods
Author :
Orlov, Anatolii ; Ulianova, Veronika ; Yakimenko, Yuriy ; Bogdan, Oleksandr ; Pashkevich, Genadzi
Author_Institution :
Dept. of Microelectron., Nat. Tech. Univ. of Ukraine “KPI”, Kiev, Ukraine
Abstract :
The original results of the development of ultraviolet sensor based on surface acoustic wave resonator with apodized interdigital transducers and reversing multistrip coupler were presented. ZnO nanorods or Al-doped nanorods grown by hydrothermal method were applied as sensing layer. The frequency shift for the modified with ZnO nanorods sensor was about 150 kHz while for the modified with Al-doped ZnO nanorods sensor the frequency shift was about 100 kHz. Both types of coating provided excellent selectivity for ultraviolet radiation. The ultraviolet sensor based on surface acoustic waves demonstrated good repeatability but complete recovery of the central frequency was about 60 min.
Keywords :
II-VI semiconductors; aluminium; interdigital transducers; nanorods; nanosensors; surface acoustic wave resonators; surface acoustic wave sensors; ultraviolet detectors; wide band gap semiconductors; zinc compounds; SAW UV sensor; ZnO; ZnO:Al; apodized interdigital transducers; frequency shift; hydrothermal method; nanorods; repeatability; reversing multistrip coupler; selectivity; surface acoustic wave resonator; ultraviolet radiation; II-VI semiconductor materials; Resonant frequency; Sensors; Substrates; Surface acoustic waves; Zinc oxide; Al-doped ZnO nanorod; ZnO nanorod; reversing multistrip coupler; surface acoustic wave; ultraviolet sensor;
Conference_Titel :
Electronics and Nanotechnology (ELNANO), 2015 IEEE 35th International Conference on
Conference_Location :
Kiev
DOI :
10.1109/ELNANO.2015.7146861
