Title :
A new approach to improving the quality of measurements in multi-wave interference systems
Author :
Guzhov, V.I. ; Ilinykh, S.P. ; Kabak, E.S. ; Rizhov, P.S.
Author_Institution :
Novosibirsk State Technical University, NSTU, Russia
Abstract :
This paper proposes a method of expanding the range and improving the accuracy of interferometric measurements using three wavelengths. The method is based on the methods of modular mathematics for phase unwrapping. Unlike the known methods of unwrapping the phase accuracy of the proposed method is almost independent of the value of the dynamic range.
Keywords :
Dynamic range; Holography; Interference; Optical interferometry; Optical variables measurement; Semiconductor device measurement; Wavelength measurement; laser; measuring range; mechatronics; optical interference system; robotics;
Conference_Titel :
Control and Communications (SIBCON), 2015 International Siberian Conference on
Conference_Location :
Omsk, Russia
Print_ISBN :
978-1-4799-7102-2
DOI :
10.1109/SIBCON.2015.7147033
