Title :
The measuring systems of semiconductor structures and its software
Author :
Ermachikhin, A.V. ; Litvinov, V.G. ; Maslov, A.D.
Author_Institution :
Dept. of Biomed. & Semicond. Electron. (BMSE)., Ryazan State Radio Eng. Univ., Ryazan, Russia
Abstract :
In this paper the description of the measuring system that includes admittance spectroscopy and low-frequency noise, methods of measuring current-voltage and capacitance-voltage is given.
Keywords :
capacitance measurement; electric admittance measurement; electric current measurement; noise; voltage measurement; admittance spectroscopy; capacitance-voltage measurements; current-voltage measurements; low-frequency noise; measuring systems; semiconductor structures; software; Biomedical measurement; Current measurement; Density measurement; Frequency measurement; Noise measurement; Semiconductor device measurement; Temperature measurement; automation of measurements; capacitance-voltage characteristics; current-voltage characteristics; gpib; labview; power spectral density; spectroscopy of low-frequency noise;
Conference_Titel :
Control and Communications (SIBCON), 2015 International Siberian Conference on
Conference_Location :
Omsk
Print_ISBN :
978-1-4799-7102-2
DOI :
10.1109/SIBCON.2015.7147318
