A novel biaxial resonant micro accelerometer with microleverage mechanism

In this research, a novel biaxial resonant micro accelerometer with a single proof mass is presented, which realizes decoupling effect between two orthogonal axes by decoupling beam and increases sensitivity by microleverage mechanism. This device was fabricated in commercial process of SOIMUMPs. The device was fixed on a rotating structure and put in a vacuum chamber for testing. The experimental results demonstrate a low level of cross-axis sensitivity and a differential sensitivity of 71.25 Hz/g around a resonant frequency of about 267.7 kHz under 37.5 mTorr vacuum pressure.