A novel scheme design of a high-g optical NEMS accelerometer based on a single chip grating with proper sensitivity and large bandwidth

In this paper, an innovative scheme design of an optical NEMS accelerometer based on a grating with proper sensitivity and dynamic range is proposed, which can be fabricated by a single SOI chip and IC integration technique. An optical micro cavity composed of a grating and the bottom bulk silicon coated with argentum serves as a high sensitivity displacement sensor. The optical displacement detecting principle is specifically discussed in this paper. The parameter of grating, which acts as both the inertial mass and optical element, has been designed through the optimization of FDTD. In addition, a quad serpentine beam structure is introduced to this accelerometer to transfer the acceleration to the displacement of the inertial mass. The performance of the mechanical structure is optimized by the ANSYS, which can acquire high mechanical sensitivity and extremely low crosstalk between different sensitive axes.