DocumentCode :
718894
Title :
Fabrication of graphene interdigitated electrodes and all-carbon electronic devices
Author :
Shuangxi Xie ; Niandong Jiao ; Lianqing Liu ; Tung, Steve
Author_Institution :
State Key Lab. of Robot., Shenyang Inst. of Autom., Shenyang, China
fYear :
2015
fDate :
7-11 April 2015
Firstpage :
314
Lastpage :
317
Abstract :
Graphene has been widely studied because of its high mobility, superior mechanical properties and excellent thermal and chemical stability. This paper describes a novel and flexible method to fabricate graphene interdigitated electrodes and all-carbon field effect transistor (FET). In this approach, graphene is first grown by chemical vapor deposition (CVD) and assembled onto a microelectrode chip. Then, an atomic force microscopy (AFM) based mechanical machining method is employed to cut the graphene into interdigitated electrodes with nanogaps. Finally, single-walled carbon nanotubes (SWCNTs) are assembled onto the graphene interdigitated electrodes using dielectrophoresis to complete the FET device. The electrical properties of the fabricated SWCNT-graphene FET were investigated, and the I-V curves demonstrated the p-type nature of SWCNTs in the FET.
Keywords :
atomic force microscopy; chemical vapour deposition; electron mobility; electrophoresis; field effect transistors; graphene devices; microelectrodes; single-wall carbon nanotubes; thermal stability; AFM; CVD; FET device; SWCNT-graphene FET; all-carbon electronic devices; all-carbon field effect transistor; atomic force microscopy; chemical stability; chemical vapor deposition; dielectrophoresis; graphene interdigitated electrodes fabrication; mechanical machining method; mechanical properties; microelectrode chip; nanogaps; single-walled carbon nanotubes; thermal stability; Assembly; Electrodes; Fabrication; Field effect transistors; Force; Graphene; Substrates; AFM; SWCNTs; all-carbon; dielectrophoresis; graphene; interdigitated electrodes;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2015 IEEE 10th International Conference on
Conference_Location :
Xi´an
Type :
conf
DOI :
10.1109/NEMS.2015.7147434
Filename :
7147434
Link To Document :
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