Title :
Design and fabrication of a triaxial cutting force dynamometer based on MEMS technique
Author :
You Zhao ; Yulong Zhao ; Songbo Liang
Author_Institution :
State Key Lab. for Manuf. Syst. Eng., Xi´an Jiaotong Univ., Xi´an, China
Abstract :
This paper presents the design, fabrication and test of a triaxial cutting force dynamometer based on MEMS (micro-electro-mechanical system) technology. MEMS chip was utilized as transition element of the designed dynamometer because of its excellent sensitivity, favorable accuracy and high integration. In order to measure triaxial cutting forces, an innovative structure of two mutual-perpendicular octagonal rings was proposed and four MEMS chips were mounted on specified locations for sensing and generating force signals. Static calibration test illustrates that the dynamometer possesses favorable performances when compared to previous works; dynamic metal cutting experiment demonstrates that the dynamometer owns great potential for real time cutting force measurement in turning operation.
Keywords :
calibration; cutting; dynamometers; force measurement; force sensors; microfabrication; microsensors; signal generators; MEMS technique; force signal generation; microelectromechanical system technology; microfabrication; mutual-perpendicular octagonal ring; static calibration testing; triaxial cutting force dynamometer; triaxial cutting force measurement; Calibration; Force; Force measurement; Metals; Micromechanical devices; Turning; MEMS; cutting force; dynamometer; favorable performances; triaxial;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2015 IEEE 10th International Conference on
Conference_Location :
Xi´an
DOI :
10.1109/NEMS.2015.7147436