Research on the resonant frequency of MEMS gyroscopes under varying tuning voltage

In this paper, the influence of MEMS gyroscope´s tuning voltage on its resonant frequency is investigated analytically and experimentally. The theoretical deduction shows that, with the increase of the tuning voltage, the frequency of drive mode is constant due to area-changing electrostatic driving scheme, while the square of the frequency of the sense mode is linearly dependent on the square of the tuning voltage due to the gap-changing electrostatic sensing scheme. Experimental results demonstrate good agreement with the theoretical analysis. Furthermore, the frequency of sense mode is affected by the structure and fabrication process of MEMS gyroscopes.