• DocumentCode
    718918
  • Title

    A study of directional MEMS dual-fences gauge

  • Author

    Chengyu Ma ; Binghe Ma ; Jinjun Deng ; Xinhang Jin

  • Author_Institution
    Key Lab. of Micro/Nano Syst. for Aerosp., Northwestern Polytech. Univ., Xi´an, China
  • fYear
    2015
  • fDate
    7-11 April 2015
  • Firstpage
    449
  • Lastpage
    452
  • Abstract
    In this paper, MEMS surface fence gauges are developed to measure simultaneously the magnitude and direction of wall shear stress in wind tunnel under two-dimensional turbulent boundary layers. The dual-fences are packaged together orthogonal to each other. In order to avoid the mutual influence caused by the flow field disturbance, the optimization analysis of the relative location of the two fences is carried out, and the simulation results indicate that the coupling influence between dual-fences was basically eliminated while the separation distance of two fences is four times its own length. Comparison experiments are made to verify the correctness of the flow simulation results, and the directional sensitivities of dual MEMS surface fence are calibrated, which indicated that MEMS dual-fences are equipped to distinguish direction of wall shear stress.
  • Keywords
    boundary layer turbulence; calibration; electronics packaging; flow measurement; flow sensors; flow simulation; gauges; microsensors; optimisation; stress measurement; surface topography measurement; wind tunnels; MEMS surface fence gauge; calibration; direction measurement; directional MEMS dual-fence gauge; electronics packaging; flow field disturbance simulation; magnitude measurement; optimization analysis; two dimensional turbulent boundary layers; wall shear stress measurement; wind tunnel; Fluids; Micromechanical devices; Sensitivity; Sensor arrays; Stress; Stress measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems (NEMS), 2015 IEEE 10th International Conference on
  • Conference_Location
    Xi´an
  • Type

    conf

  • DOI
    10.1109/NEMS.2015.7147465
  • Filename
    7147465