A MEMS accelerometer for spindle monitoring system

Vibration acceleration detection of spindle monitoring requires that the accelerometer has an adequate measurement sensitivity and response frequency above the interested range. This paper aims at design a kind of micro-electro-mechanical system (MEMS) accelerometer that can be used in the spindle component´s vibration detection. To measure the vibration acceleration of the high speed spindle accurately, the accelerometer uses the cantilever beam-membrane (CBM) structure as sensing structure. In order to verify that the design of the sensor can be used in the spindle monitoring system, the vibration signal of spindle monitoring system were tested at different rotational speed. Experimental results show that the developed sensor is able to accurately identify the vibration signals in the monitoring system.