Title :
A gold nano-dot modified silicon tip apex for scanning Kelvin probe microscopy
Author :
Chun-Ting Lin ; Ching-Hao Chen ; Chien-Ting Wu ; Chien-Nan Hsiao ; Ming-Hua Shiao ; Mao-Nan Chang
Author_Institution :
Nat. Appl. Res. Labs., Instrum. Technol. Res. Center, Hsinchu, Taiwan
Abstract :
In this paper, a gold nano-dot (Au-ND) is successfully prepared on a silicon tip apex for scanning Kelvin probe microscopy (SKPM) applications. An extra facile localized fluoride assisted Galvanic replacement reaction (LFAGRR) is proposed to replace the silicon (Si) atoms at the tip apex with Au ones. We successfully fabricated Au-ND coated tip apex by tapping the Si tip apex against a thin layer of electrolyte containing HAuCl4 and HF, which is supported by a commercial anodic aluminum oxide (AAO) slice. In a typical process, a Au-ND with approximate 30 nm in diameter was fabricated within 30 seconds in the ambient condition. Our preliminary results demonstrated a cost-effective and facile process to prepare a noble metal-nanodot (metal-ND) modified AFM tip apex. It is expected that current technology has high potential to be applied to the applications of field sensitive scanning probe microscopy (FS-SPM).
Keywords :
anodisation; atomic force microscopy; coatings; electrolytes; elemental semiconductors; gold; nanofabrication; silicon; AAO; Au; Au-ND; FS-SPM; HAuCl4; HF; LFAGRR; SKPM; Si; anodic aluminum oxide; electrolyte; extra facile localized fluoride assisted Galvanic replacement reaction; field sensitive scanning probe microscopy; gold nanodot; metal-ND; metal-nanodot; modified AFM tip apex; modified silicon coated tip apex; scanning Kelvin probe microscopy; time 30 s; Gold; Nanoscale devices; Scanning electron microscopy; Silicon; Silver; Surface treatment; Au NPs; Galvanic replacement reaction; SKPM; tip modification;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2015 IEEE 10th International Conference on
Conference_Location :
Xi´an
DOI :
10.1109/NEMS.2015.7147504