Title :
60 GHz active microscopy with a bow-tie antenna as near-field probe
Author :
Omarouayache, Rachid ; Chusseau, Laurent ; Payet, Pierre ; Raoult, Jeremy ; Jarrix, Sylvie
Author_Institution :
IES, Univ. Montpellier 2, St. Priest, France
Abstract :
A near-field reflectometry experiment operating at 60 GHz is built in view of material and circuit inspection. The linearly-polarized electric-field probe is a bow-tie antenna obtained from femtosecond laser cutting of pieces in a tungsten metal sheet subsequently attached to an open rectangular waveguide. First images reveal a true near-field detection with strongly subwavelength resolution up to λ/130 at a 5 μm probe-sample distance. Images of various metal objects evaporated on Si substrate also show near-field intensities that are quantitatively related to the conductivity of the different metals.
Keywords :
bow-tie antennas; electromagnetic wave polarisation; laser beam cutting; microwave reflectometry; millimetre wave antennas; rectangular waveguides; active microscopy; bow-tie antenna; femtosecond laser cutting; frequency 60 GHz; linearly polarized electric field probe; near-field detection; near-field intensity; near-field refiectometry; rectangular waveguide; tungsten metal sheet; Antennas; Artificial intelligence; Gold; Probes; Spatial resolution; Thickness measurement;
Conference_Titel :
Instrumentation and Measurement Technology Conference (I2MTC), 2015 IEEE International
Conference_Location :
Pisa
DOI :
10.1109/I2MTC.2015.7151441
