Title :
Influence of Cu underlayer on the high-frequency magnetic properties of FeCoSiO thin films
Author :
Lu, G. ; Miao, X. ; Cheng, W. ; Huang, X. ; Yang, L. ; Pan, L.
Author_Institution :
Sch. of Opt. & Electron. Inf., Huazhong Univ. of Sci. & Technol., Wuhan, China
Abstract :
A series of soft magnetic FeCoSiO films were fabricated on Si (100) substrates using Cu as underlayer by radio frequency magnetron sputtering. The influence of Cu underlayers on the dynamic magnetic properties of as-sputtered FeCoSiO thin films were studied in details.
Keywords :
cobalt compounds; iron compounds; magnetic thin films; soft magnetic materials; sputter deposition; Cu underlayer; FeCoSiO; Si; Si (100) substrates; dynamic magnetic properties; high-frequency magnetic properties; radiofrequency magnetron sputtering; soft magnetic thin films; Damping; Magnetic films; Magnetic properties; Magnetic resonance; Magnetomechanical effects; Saturation magnetization;
Conference_Titel :
Magnetics Conference (INTERMAG), 2015 IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4799-7321-7
DOI :
10.1109/INTMAG.2015.7156980
