Title :
Influence of the preparation process and target composition on crystal structure and magnetic properties of NdFeB thin films
Author :
Su, H. ; Zhang, J. ; Du, J. ; Xia, W. ; Yan, A. ; Liu, J.
Author_Institution :
Key Lab. of Magn. Mater. & Devices, Ningbo Inst. of Mater. Technol. & Eng., Ningbo, China
Abstract :
NdFeB thin films prepared by target with different Nd content is investigated in this study. The influence of annealing conditions, deposition temperature and sputtering power on single-layer NdFeB films are discussed. The permanent magnet performance with the values as high as u0Mr=1 .32 T, u0Hc=1226 kA/m and (BH)max=378 kJ/m3 was obtained. Observations show that saturation magnetization decreases with the ascension of sputtering power at the same target composition.
Keywords :
annealing; boron alloys; crystal structure; iron alloys; magnetic thin films; magnetisation; metallic thin films; neodymium alloys; permanent magnets; sputter deposition; NdFeB; annealing; crystal structure; deposition temperature; magnetic properties; permanent magnet; saturation magnetization; single-layer thin films; sputtering power; target composition; Annealing; Films; Magnetic hysteresis; Magnetic properties; Saturation magnetization; Sputtering; Temperature;
Conference_Titel :
Magnetics Conference (INTERMAG), 2015 IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4799-7321-7
DOI :
10.1109/INTMAG.2015.7157725
