Title :
Research on a novel synchronous permanent magnet planar motor with concentric winding for lithography
Author :
Zhang, L. ; Kou, B. ; Xing, F. ; Jin, Y.
Author_Institution :
Dept. of Electr. Eng., Harbin Inst. of Technol., Harbin, China
Abstract :
A novel synchronous permanent magnet planar motor (SPMPM) which with concentric structure winding is investigated in this paper. Topology of this SPMPM is introduced, and as the mover can move freely on the stator, the planar motor is suitable for long-stroke applications in the lithography. Flux density, electromagnetic thrust and back-EMF of the SPMPM are obtained analytically and compared with the finite element simulation results. A prototype is manufactured and tested successfully. The measured values matching the simulated ones well.
Keywords :
electric potential; magnetic flux; permanent magnet motors; stators; synchronous motors; back-EMF; concentric structure winding; electromagnetic thrust; flux density; lithography; stator; synchronous permanent magnet planar motor; Magnetic flux; Permanent magnet motors; Permanent magnets; Planar motors; Prototypes; Synchronous motors; Windings; Planar motor; analytical model; concentric winding; prototype;
Conference_Titel :
Magnetics Conference (INTERMAG), 2015 IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4799-7321-7
DOI :
10.1109/INTMAG.2015.7157804
