Vibration mode analysis on piezoelectric diaphragms for ultrasonic microsensors

Author

Nishiumi, Taiki ; Yamashita, Kaoru ; Tanaka, Hikaru ; Arai, Kaito ; Noda, Minoru

Author_Institution

Grad. Sch. of Sci. & Technol., Kyoto Inst. of Technol., Kyoto, Japan

fYear

2015

fDate

4-5 June 2015

Firstpage

86

Lastpage

87

Abstract

Piezoelectric diaphragm-type ultrasonic microsensors were fabricated and their vibration modes were investigated from the viewpoint of sensitivity affected by the distribution of piezoelectrically induced polarization. Three kinds of diaphragms were fabricated with the geometries of square-flat, square-buckled and circular-buckled, to clarify the effect of the diaphragm geometry to higher-order vibrations generated by a received ultrasound pulse. The square-flat diaphragms showed less higher-order vibrations compared to the square-buckled ones, and the circular-buckled showed even less higher-order vibration among them and is the suitable geometry for the piezoelectric diaphragm sensors.

Keywords

diaphragms; geometry; microfabrication; microsensors; piezoelectric transducers; ultrasonic transducers; vibration measurement; circular-buckled diaphragm geometry effect; higher-order vibration generation; microfabrication; piezoelectric diaphragm sensor; piezoelectrically induced polarization; received ultrasound pulse; square-buckled diaphragm geometry effect; square-flat diaphragm geometry effect; ultrasonic microsensor; vibration mode analysis; Frequency measurement; Geometry; Microsensors; Shape; Ultrasonic imaging; Vibration measurement; Vibrations; charge distribution; piezoelectric; resonant mode; sensitivity; ultrasonic sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Future of Electron Devices, Kansai (IMFEDK), 2015 IEEE International Meeting for

Conference_Location

Kyoto

Print_ISBN

978-1-4799-8614-9

Type

conf

DOI

10.1109/IMFEDK.2015.7158562

Filename

7158562