Title :
Vibration mode analysis on piezoelectric diaphragms for ultrasonic microsensors
Author :
Nishiumi, Taiki ; Yamashita, Kaoru ; Tanaka, Hikaru ; Arai, Kaito ; Noda, Minoru
Author_Institution :
Grad. Sch. of Sci. & Technol., Kyoto Inst. of Technol., Kyoto, Japan
Abstract :
Piezoelectric diaphragm-type ultrasonic microsensors were fabricated and their vibration modes were investigated from the viewpoint of sensitivity affected by the distribution of piezoelectrically induced polarization. Three kinds of diaphragms were fabricated with the geometries of square-flat, square-buckled and circular-buckled, to clarify the effect of the diaphragm geometry to higher-order vibrations generated by a received ultrasound pulse. The square-flat diaphragms showed less higher-order vibrations compared to the square-buckled ones, and the circular-buckled showed even less higher-order vibration among them and is the suitable geometry for the piezoelectric diaphragm sensors.
Keywords :
diaphragms; geometry; microfabrication; microsensors; piezoelectric transducers; ultrasonic transducers; vibration measurement; circular-buckled diaphragm geometry effect; higher-order vibration generation; microfabrication; piezoelectric diaphragm sensor; piezoelectrically induced polarization; received ultrasound pulse; square-buckled diaphragm geometry effect; square-flat diaphragm geometry effect; ultrasonic microsensor; vibration mode analysis; Frequency measurement; Geometry; Microsensors; Shape; Ultrasonic imaging; Vibration measurement; Vibrations; charge distribution; piezoelectric; resonant mode; sensitivity; ultrasonic sensors;
Conference_Titel :
Future of Electron Devices, Kansai (IMFEDK), 2015 IEEE International Meeting for
Conference_Location :
Kyoto
Print_ISBN :
978-1-4799-8614-9
DOI :
10.1109/IMFEDK.2015.7158562
