Title :
Properties of novel atmospheric pressure plasma generator inducing surface airflow by scanning discharge
Author :
Furuhi, Tomoshige ; Kawata, Shuichi ; Takada, Takahiro
Author_Institution :
Murata Manuf. Co., Ltd., Kyoto, Japan
Abstract :
A novel structure of atmospheric pressure plasma generator is proposed and its properties are studied. It has linear electrodes arranged in parallel, which are applied with three-phase sinusoidal voltages. The experimental results show (1) induced airflow based on scanning discharge without mechanical moving parts, (2) production of ozone gas, and (3) electric power consumption estimated with Q-V Lissajous figure method.
Keywords :
discharges (electric); ozone generators; plasma devices; plasma flow; plasma sources; O3; Q-V Lissajous figure method; atmospheric pressure plasma generator; electric power consumption; linear electrodes; ozone gas production; pressure 1 atm; scanning discharge; surface airflow; three-phase sinusoidal voltages; Discharges (electric); Electrodes; Gases; Generators; Plasmas; Production; Surface discharges; Q-V Lissajous figure; airflow; atmospheric pressure plasma; ozone;
Conference_Titel :
Future of Electron Devices, Kansai (IMFEDK), 2015 IEEE International Meeting for
Conference_Location :
Kyoto
Print_ISBN :
978-1-4799-8614-9
DOI :
10.1109/IMFEDK.2015.7158577
