Title :
Heterogeneous integration of microscale compound semiconductor devices by micro-transfer-printing
Author :
Bower, Christopher A. ; Meitl, Matthew A. ; Bonafede, Salvatore ; Gomez, David
Author_Institution :
X-Celeprint Inc., Research Triangle Park, NC, USA
Abstract :
Integrating microscale electronic devices onto non-native substrates enables new kinds of products with desirable functionalities and cost structures that are inaccessible by conventional means. Micro assembly technologies are the practical ways to make such microscale heterogeneous device combinations possible. Elastomer stamp micro-transferprinting technology (μTP) is a widely-demonstrated form of micro assembly, having demonstrated applicability in optical communications, magnetic storage, concentrator photovoltaics and display technologies. Here we describe new experiments designed to assess the useful lifetime of the viscoelastic elastomer transfer stamp, and also describe the methodology and results for heterogeneous integration of microscale compound semiconductor devices onto non-native substrates using μTP.
Keywords :
microassembling; printing; concentrator photovoltaics; display technologies; heterogeneous integration; magnetic storage; microassembly technology; microscale compound semiconductor device; microtransfer printing; nonnative substrates; optical communications; viscoelastic elastomer transfer stamp; Assembly; Gallium arsenide; Polymers; Printing; Silicon; Substrates;
Conference_Titel :
Electronic Components and Technology Conference (ECTC) , 2015 IEEE 65th
Conference_Location :
San Diego, CA
DOI :
10.1109/ECTC.2015.7159711