• DocumentCode
    723195
  • Title

    Influence of UBM metallurgy on Sn textures and EM failure

  • Author

    Minhua Lu ; Hongqing Zhang

  • Author_Institution
    IBM T. J. Watson Res. Center, Yorktown Heights, NY, USA
  • fYear
    2015
  • fDate
    26-29 May 2015
  • Firstpage
    1785
  • Lastpage
    1788
  • Abstract
    Influence of UBM and substrate metallurgy on electromigraiton is studied. It is found that SnAg interconnects with Cu UBM and CuOSP substrate finish tend to have single or few grains, while the same SnAg interconnect with Ni UBM and NiAu substrate finish tend to have interlaced twining textures. The twining in Ni/Ni metallurgy randomize the grain orientation to a certain degree, so that no fast diffusion paths exists between the cathode and anode, which could lead to the existence of the critical length observed in EM experiments. With a single grain texture, Cu/Cu metallurgy is more prone to electromigration degradation when the c-axis of the Sn grain is aligned with the current direction, which could be an explanation for the lack of an EM critical current. Morphology of EM induced voids sectioned with FIB, showed that voids are formed by out diffusion of fast diffusors such as Ni and Cu from the intermetallic, leaving behind voids and Sn rich material.
  • Keywords
    copper alloys; electromigration; integrated circuit metallisation; integrated circuit reliability; metallurgy; nickel alloys; silver alloys; tin alloys; voids (solid); Cu-Cu; Ni-Ni; SnAg; UBM metallurgy; electromigration degradation; electromigration failure; grain orientation; substrate metallurgy; tin textures; underbump metallurgy; void formation; Critical current density (superconductivity); Current density; Electromigration; Nickel; Resistance; Stress; Tin;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Components and Technology Conference (ECTC) , 2015 IEEE 65th
  • Conference_Location
    San Diego, CA
  • Type

    conf

  • DOI
    10.1109/ECTC.2015.7159840
  • Filename
    7159840