A novel multiple-shell vibratory ring gyroscope

This paper presents the design of a novel multiple-shell vibratory ring gyroscope with increased capacitance for actuation and detection. The multiple shell ring gyroscope is formed as several concentering cylindrical shells with enough space between them to place electrodes in the middle. The structure yields in-plane degenerate flexural modes that are utilized to sense rotation along the normal axis. A sample of the new gyroscope was designed and simulated by finite element analysis. The performance of the new design was compared to the traditional single shell gyroscope. Multiple-shells enable larger resonant mass, which reduces the mechanical noise floor of the sensor. The increased electrode area helps lower the actuation voltages and enhance the pick off signal. The design was implemented using SOI-MUMPs technology, and practical verification of the proposed design will be published in an upcoming work.