• DocumentCode
    723541
  • Title

    A double-pole single-throw latching MEMS switch for reconfigurable distribution frames

  • Author

    Dellaert, Dries ; Doutreloigne, Jan

  • Author_Institution
    CMST, Ghent Univ., Ghent, Belgium
  • fYear
    2015
  • fDate
    27-30 April 2015
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    A double-pole single-throw latching MEMS switch is presented, which could be used as reconfiguration switches in telecommunication networks. The switch can latch into a closed state so that no energy is needed to stay in that state. The latching mechanism was operated using thermal actuators which use a polysilicon heater underneath the structural layer. Using the MetalMUMPs technology, the switch was successfully fabricated and was able to latch into the closed state. Cycling tests of 105 latching cycles showed that the switch resistance remains below 3Ω.
  • Keywords
    actuators; flip-flops; microswitches; MetalMUMP technology; double-pole single-throw latching MEMS switch; polysilicon heater; reconfigurable distribution frames; reconfiguration switches; telecommunication networks; thermal actuators; Actuators; Communications technology; Contacts; Force; Heating; Microswitches; Resistance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2015 Symposium on
  • Conference_Location
    Montpellier
  • Print_ISBN
    978-1-4799-8627-9
  • Type

    conf

  • DOI
    10.1109/DTIP.2015.7161002
  • Filename
    7161002
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=723541