A double-pole single-throw latching MEMS switch for reconfigurable distribution frames

A double-pole single-throw latching MEMS switch is presented, which could be used as reconfiguration switches in telecommunication networks. The switch can latch into a closed state so that no energy is needed to stay in that state. The latching mechanism was operated using thermal actuators which use a polysilicon heater underneath the structural layer. Using the MetalMUMPs technology, the switch was successfully fabricated and was able to latch into the closed state. Cycling tests of 10⁵ latching cycles showed that the switch resistance remains below 3Ω.