Title :
Piezoelectric actuator characteristics measurement based on harris corner location
Author :
Yanmei Liu ; Bowei Jin ; Li Fu ; Zaili Dong
Author_Institution :
Sch. of Autom., Shenyang Aerosp. Univ., Shenyang, China
Abstract :
In order to obtain the driving characteristics of piezoelectric actuators, in this paper, the initial position is got by Harris corner location method. Initial template matching region is obtained by criteria raster image sequence process corner matching. A modified sub-pixel image block matching method is used to measure the actual driving characteristics of piezoelectric actuators. Experimental results show that the algorithm of displacement measurement has high accuracy and good stability. Piezoelectric characteristic curves obtained in line are compared with the results of physical analysis and able to satisfy the requirements of high-precision measurements of nanomanipulation.
Keywords :
displacement measurement; edge detection; image matching; image sequences; nanopositioning; piezoelectric actuators; Harris corner location method; displacement measurement; driving characteristics; high-precision measurements; initial template matching region; modified subpixel image block matching method; nanomanipulation; piezoelectric actuator characteristics measurement; piezoelectric characteristic curves; raster image sequence process corner matching; Piezoelectric actuators; Harris corner; Piezoelectric actuator; Sub-pixel match; nanomanipulation;
Conference_Titel :
Control and Decision Conference (CCDC), 2015 27th Chinese
Conference_Location :
Qingdao
Print_ISBN :
978-1-4799-7016-2
DOI :
10.1109/CCDC.2015.7161834