Title :
Wide band study of silicon-on-insulator photodiodes on suspended micro-hotplates platforms
Author :
Andre, N. ; Li, G. ; Gerard, P. ; Poncelet, O. ; Zeng, Y. ; Ali, S.Z. ; Udrea, F. ; Francis, L.A. ; Flandre, D.
Author_Institution :
Inst. of Inf. & Commun. Technol., Electron. & Appl. Math., Univ. Catholique de Louvain, Louvain-la-Neuve, Belgium
Abstract :
In this paper, the performances of a lateral thin-film PIN photodiode based on silicon-on-insulator technology are reported for applications from blue to red wavelengths. The platform consists of a micro-hotplate with a suspended heater and a photodiode. Responsivities of 0.01 to 0.05 A/W were obtained for 450-900 nm light range in reverse bias operation. Suspended photodiodes give up to 5x responsivity improvement with regard to the photodiodes on substrate. In addition to photodetection, the diode can monitor the temperature with a linear voltage decreasing by about 1.4 mV/K, under 50 μA constant forward current for a large range of temperature (measured from 25 to 300°C).
Keywords :
p-i-n photodiodes; photodetectors; silicon-on-insulator; thin film devices; Si; lateral thin-film PIN photodiode; linear voltage; microhotplates platforms; photodetection; reverse bias operation; silicon-on-insulator photodiodes; silicon-on-insulator technology; suspended heater; suspended photodiodes; temperature 25 degC to 300 degC; wavelength 450 nm to 900 nm; Photodiodes; Silicon; Silicon-on-insulator; Substrates; Temperature measurement; Temperature sensors; CMOS technologies; Harsh environment; Lateral thin-film PIN diode; Semiconductor photodiode; Silicon-on-Insulator; Temperature sensor;
Conference_Titel :
IC Design & Technology (ICICDT), 2015 International Conference on
Conference_Location :
Leuven
DOI :
10.1109/ICICDT.2015.7165879
