An accurate parametric electrical model for slow-wave CPW

In this paper, a parametric predictive electrical model of the slow-wave coplanar waveguide structure (S-CPW) is presented. The model was developed under the assumption of Quasi-TEM propagation mode. Within this context, analytical formulas, parameterized by S-CPW geometric dimensions, were implied for each electric parameter in the model. The model was validated with 3D electromagnetic simulations and measurement results on the BiCMOS 130 nm technology. An excellent agreement was achieved over a wide frequency band, from DC up to 110 GHz, with a maximum error of 10 %. Consequently, the model provides a fast and powerful tool for designing and optimizing circuits based on S-CPWs.