Polyharmonic Distortion modeling of RF BAW components

For the first time the Polyharmonic Distortion (PHD) model has been used to characterize the nonlinearities of Bulk Acoustic Wave (BAW) components. For that purpose a measurement setup has been developed by extending a nonlinear vector network analyzer with required external components enabling X-parameter measurements at high power levels. By discussion of selected components of the BAW resonator´s PHD model and performing simulations in an RF design environment the importance of PHD model for improved BAW filter design has been demonstrated.