Title :
Quality factor optimization of composite piezoelectric single-crystal silicon MEMS resonators
Author :
Mortada, Ossama ; Blondy, Pierre ; Orlianges, Jean-Christophe ; Chatras, Matthieu ; Crunteanu, Aurelian
Author_Institution :
Univ. of Limoges, Albert, France
Abstract :
This paper reports the design, simulation, fabrication and test results of piezoelectric MEMS resonators. We demonstrate that the reduction of the ZnO thickness from 800 nm to 200 nm increases the quality factor from 430 to 1600 respectively around 700 MHz. Experimental data are in very good agreement with theoretical computations.
Keywords :
Q-factor; crystal resonators; elemental semiconductors; micromechanical resonators; optimisation; silicon; zinc compounds; ZnO; composite piezoelectric single-crystal silicon MEMS resonators; quality factor optimization; Couplings; Electrodes; II-VI semiconductor materials; Micromechanical devices; Q-factor; Silicon; Zinc oxide; MEMS resonators; Piezoelectric; zinc oxide (ZnO);
Conference_Titel :
Microwave Symposium (IMS), 2015 IEEE MTT-S International
Conference_Location :
Phoenix, AZ
DOI :
10.1109/MWSYM.2015.7166968
