Title :
A readout circuit with novel zero-g offset calibration for tri-axes capacitive MEMS accelerometer
Author :
Jungryoul Choi ; Jungwoo Lee ; Sangyun Han ; Sungwook Kim ; Soonwon Hong ; Joongho Choi
Author_Institution :
Sensor Technol. Lab., Sensonia Inc., South Korea
Abstract :
A precise readout circuit with novel zero-g offset calibration for a high-end MEMS accelerometer is proposed. On-chip coarse and fine trimming in the readout circuit can reduce the wide range of zero-g offset to a few mg of a high-end MEMS accelerometer´s zero-g offset accuracy. The readout circuit is fabricated in a 0.18um 1P4M CMOS process and consumes 900μW from a single 3.3-V supply.
Keywords :
CMOS integrated circuits; accelerometers; micromechanical devices; readout electronics; 1P4M CMOS process; power 900 muW; readout circuit; size 0.18 mum; tri-axes capacitive MEMS accelerometer; voltage 3.3 V; zero-g offset calibration; Acceleration; Accelerometers; Calibration; Capacitance; Capacitors; Micromechanical devices; Sensors;
Conference_Titel :
Circuits and Systems (ISCAS), 2015 IEEE International Symposium on
Conference_Location :
Lisbon
DOI :
10.1109/ISCAS.2015.7168820
