High-Performance GaN-Based Nanochannel FinFETs With/Without AlGaN/GaN Heterostructure

Two types of fin-shaped field-effect transistors (FinFETs), one with AlGaN/GaN heterojunction and the other with heavily doped heterojunction-free GaN layer operating in junctionless mode, have been fabricated and characterized. The threshold voltages of both devices shift toward positive direction from large negative value as the fin width decreases. Both devices exhibit high ON-state performance. The heterojunction-free GaN FinFETs show superior OFF-state performance because the current flows through the volume of the GaN channel layer, which can be fully depleted. The proposed GaN nanochannel FinFETs are very promising candidates not only for high performance, but also for high power applications.