Title :
Modification of the surface layer of metal materials under the combined influence of high intensity pulsed ion beam and magnetron sputtering
Author :
Remnev, G.E. ; Lebedynskiy, A.M. ; Legostaev, V.N. ; Pavlov, S.K. ; Petrov, A.V. ; Smolyanskiy, E.V. ; Stepanov, A.V.
Author_Institution :
Nat. Res. Tomsk Polytech. Univ., Tomsk, Russia
Abstract :
The enhancement of metal and alloys operating characteristics can be achieved by high intensity pulsed ion beam treatment due to modification of the morphology and the structural phase state of the surface. It is possible to improve the functional properties of the tools by coating too. The combination of these methods in a single technological cycle allow us enhance the modification efficiency.
Keywords :
adhesives; coatings; ion beam effects; plasma deposition; sputter deposition; surface morphology; surface states; surface treatment; titanium alloys; titanium compounds; tungsten compounds; TiN; WC; carbon ions; coating adhesiveness; electron volt energy 300 keV; functional properties; hard alloys; high intensity pulsed ion beam sputtering; hydrogen ions; ion current density; magnetron sputtering; metal materials; physical-mechanical properties; plasma chemical deposition; pulse duration; refractory titanium alloys; structural phase modification; surface layer modification; surface morphology; surface state; time 80 ns; titanium nitride coating; tungsten carbide; Coatings; Ion beams; Metals; Morphology; Sputtering; Surface morphology; Surface treatment;
Conference_Titel :
Plasma Sciences (ICOPS), 2015 IEEE International Conference on
Conference_Location :
Antalya
DOI :
10.1109/PLASMA.2015.7179531
