Characteristics of an argon DC glow discharge and effect of cathode material on paschen curve and cathode temperature

Author

Satir, Mert ; Celik, Murat

Author_Institution

Dept. of Mech. Eng., Bogazici Univ., Istanbul, Turkey

fYear

2015

fDate

24-28 May 2015

Firstpage

1

Lastpage

1

Abstract

DC glow discharge is used in a vast range of industrial applications such as plasma processing, thin film coating by sputtering, etching, welding and light sources¹. Understanding the discharge properties is essential for better integration of these applications.

Keywords

cathodes; glow discharges; temperature measurement; thermal conductivity; thermocouples; work function; Paschen curve; argon DC glow discharge; cathode material; cathode surface temperatures; cathode temperature; discharge properties; electrical characteristics; electron density; electron temperature; etching; glow discharge current-voltage pressure characteristics; in-house built single Langmuir probe; industrial applications; light sources; minimum breakdown voltages; plasma parameters; plasma potential; plasma processing; sputtering; thermal conductivities; thermocouple temperature measurements; thin film coating; welding; work functions; Cathodes; Glow discharges; Plasma temperature; Surface discharges; Temperature; Temperature measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Sciences (ICOPS), 2015 IEEE International Conference on

Conference_Location

Antalya

Type

conf

DOI

10.1109/PLASMA.2015.7179581

Filename

7179581