Title :
Study on the parameters of barrier discharge plasma in a gas phase hydrocarbon mixture of atmospheric pressure under external heating of discharge area
Author :
Zhuravlev, Mikhail V. ; Kovantsev, Alexander S. ; Remnev, Gennady E. ; Shubin, Boris G.
Author_Institution :
Tomsk Polytech. Univ., Tomsk, Russia
Abstract :
Summary form only given. The application of barrier discharge plasma in a gas-hydrocarbon mixture to synthesize the diamond coatings is widely known. The required heating of a flat negative electrode up to high temperatures has a significant impact on the conditions for discharge formation and the required value of the voltage applied to the electrodes.The present paper is devoted to the study on the parameters of barrier discharge plasma in a gas phase hydrocarbon and hydrogen mixture of atmospheric pressure under external heating of a flat negative electrode. The investigations have been performed using a plasma chemical reactor of atmospheric pressure to synthesize the carbon film structures on the flat surface of an electrode.
Keywords :
chemical reactors; coating techniques; diamond; dielectric-barrier discharges; hydrogen compounds; organic compounds; plasma chemistry; plasma materials processing; atmospheric pressure; barrier discharge plasma; carbon film structures; diamond coatings; discharge area; discharge formation; electrode flat surface; external heating; flat negative electrode heating; gas phase hydrocarbon mixture; hydrogen mixture; plasma chemical reactor; pressure 1 atm; Coatings; Diamonds; Discharges (electric); Electrodes; Heating; Hydrocarbons; Plasmas;
Conference_Titel :
Plasma Sciences (ICOPS), 2015 IEEE International Conference on
Conference_Location :
Antalya
DOI :
10.1109/PLASMA.2015.7179736
