Electrostatic probe measurement of the piezoelectric transformer plasma source

Summary form only given. A compact ion source for neutron production is being developed for industrial and security applications. The piezoelectric transformer plasma source (PTPS) produces ion currents on the order of 10 μA using a cylindrical LiNbO₃ (lithium niobate) crystal measuring 10 mm in diameter by 2 mm thick. The PTPS has previously been characterized to determine the impact of driving voltage, gas flow, extraction voltage, and hollow anode geometry on the ion current.The plasma generated by the PTPS was further characterized using two different electrostatic probe diagnostics. A cylindrical Langmuir probe was used to approximate the electron temperature and density in the RF plasma and a triple probe was used to determine the floating voltage of the plasma. Estimations of the electron temperature and density of the plasma determined using electrostatic probe diagnostics are presented.