Title :
Power efficient microheater for wavelength selective infrared emitter and CO2 gas sensing
Author :
Ishihara, H. ; Masuno, K. ; Ishii, M. ; Kumagai, S. ; Sasaki, M.
Author_Institution :
Yazaki Corp., Shizuoka, Japan
Abstract :
A new microheater for the wavelength selective infrared emitter, which we have proposed, is fabricated showing the clear enhanced emission peak due to the surface plasmon polariton. Compared to the previous device, the thermal isolation is improved using 2μm-thick Si membrane having 3.6 and 5.4mm outer diameter. The emission at the wavelength of the absorption band of CO2 gas is enhanced confirming the suitability for the gas sensing. Against input power, the intensity at the peak wavelength shows the steeper increase than the background intensity.
Keywords :
carbon compounds; elemental semiconductors; gas sensors; infrared detectors; membranes; micromechanical devices; silicon; CO2; Si; absorption band; background intensity; gas sensing; membrane; power efficient microheater; size 2 mum; size 3.6 mm to 5.4 mm; surface plasmon polariton; thermal isolation; wavelength selective infrared emitter; Etching; Gratings; Heating; Plasmons; Resists; Silicon; Surface waves; Microheater; Thermal isolation; Wavelength selective infrared emitter;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7180896
